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Electron probe microanalysis

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Electron probe microanalysis

identification and measurement of concentration of elements based on the fact that primary-emission x-rays emitted by an element excited by an electron beam have a wavelength characteristic of that element and an intensity related to its concentration. It may be performed by an electron probe microanalyzer, an electron microscope microanalyzer, or by an electron microscope, or scanning electron microscope, fitted with an x-ray spectrometer.